POSSIBLE

Photolitho

We carry a variety of optical components ;
Interference Filter, Cover Glasses, Input-Lens, etc.

Implant

We carry a variety of parts forImplantation Process, made of Tungsten or Molybdenum.

Etching

We carry a variety parts for Etching Process;
Anodized Upper Electrodes, Lower Electrodes, Quarts or Ceramic parts.
Anodized or Polyimide ESC Refurbishment is also available.

Sputtering

We carry a variety of Clamp Rings by Titanium or SUS, Lift Hoops and Inner Sheilds.
Magnet Refurbishment is also available.

CVD

We carry a variety of Anodized Al parts, Ceramic parts and Quartz parts.
Refurbishment of Metal Heaters or Ceramic Heaters are also available.

CMP

We carry Pad Conditioners and Retainler Rings for CMP Process.

etc

A wide variety of Heating
Lamps

A wide variety of Lighting
Lamps

A wide variety of Vacuum Components

Flowmeters by DIGMESA
(above：FHKU series)
We carry a variety of
Flowmeters by DIGMESA

We carry a variety of
Flowmeters by DIGMESA.

Lamp for Ozone Analyzer

Metallurgical Microscope

EVIDENT
3D Laser Confocal Microscope
OLS-5000

Stereoscopic Microscope

EVIDENT
SZX16

EVIDENT
SZX10

EVIDENT
SZX7

EVIDENT
SZ61

EVIDENT
SZ61+SZ2-STU2 arrangement

EVIDENT
SZ61+SZ2-STU3 arrangement

Measuring Microscope

EVIDENT
STM7-BSW

Mitutoyo
Measuring Microscope+unit

※You may contct with us for various calibration services.

Projector

Mitutoyo　PH-3515F

Mitutoyo　PJ-H30

Mitutoyo　PJ-A3000

※You may contct with us for various calibration services.

Vision Measuring Systems

Mitutoyo
CNC Vision Measuring Systems
QV Series

Mitutoyo
Non-stop CNC Vision Measuring Systems
QV STREAM Series

Mitutoyo
Non-contact 2-D Vision Measuring Systems
QI Series

Mitutoyo
Manual Vision Measuring Systems
QS Series

Three D Measuring Instruments

Mitutoyo
LEGEX

Mitutoyo
CRYSTA-Apex

Mitutoyo
MACH

Mitutoyo Corporation: (Roughness Gauge, Contour Measuring instruments, Roundness testing machine, Hardness Testing Maching, Vibration Gauge, Seismometer )

Hardness Testing Machine AVK

Seismometer

Otsuka Electronics Co., Ltd : Multi Channel Photo Detector

TOSHIBA TELI CORPRATIOM :High Vision Camera
KYOWA INTERFACE SCIENCE CO., LTD: Contact Augle Meters
HIROX CO., Ltd: Digital Microscope

• Various optical components (Lens Filters)
• Lighting equipments
• Vacuum equipments and parts
• Flowmeters by DIGMESA
• Processing and various coating
• Environmental testing machines
• Testing Equipment
• Clean Booth
• Vibration-free Table
• Cleaning system of Hydrocarbons
  GV10ｘ Downstream Asher
  

Resistivity&Thickness Measurement

Wafer Sorter

Wafer Particle Cleaner

Both Faces Microscoop

Wafer Edge Profiler

Wafer Id Reader

※We design and develop suitable equipments, according to application.
　Please feel free to contact with us.

Laser concerns

We are capable to accept Laser Repair and Refurbishment of various usages.
Please feel free to contact with us.

Turbo Molecular Pumps

We are capable to accept TMP Repair and Refurbishment of various kinds.
Please feel free to contact with us.

Various countermeasures against aging of Equipments

• Replacement of CRT for exposure apparatus
• Replacement of CRT Monitors to LCD Display
• Replacement of Motors of discontinued models, etc.