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Semiconductor

Photolitho
11-5
We carry a variety of optical components ;
Interference Filter, Cover Glasses, Input-Lens, etc.

Implant
22-2-3
22-2-4
We carry a variety of parts forImplantation Process, made of Tungsten or Molybdenum.

Etching
24-6
24-5
24-4
We carry a variety parts for Etching Process;
Anodized Upper Electrodes, Lower Electrodes, Quarts or Ceramic parts.
Anodized or Polyimide ESC Refurbishment is also available.

Sputtering
20-6
20-7
We carry a variety of Clamp Rings by Titanium or SUS, Lift Hoops and Inner Sheilds.
Magnet Refurbishment is also available.

CVD
21-10
21-11
21-5

21-12
21-13
We carry a variety of Anodized Al parts, Ceramic parts and Quartz parts.
Refurbishment of Metal Heaters or Ceramic Heaters are also available.

CMP
28-1
28-2
We carry Pad Conditioners and Retainler Rings for CMP Process.

Wafer Cleaning (Spin Dryer)
11-5
We deal with cleaning equipment for various semiconductors.

etc
13-4
A wide variety of Heating
Lamps
13-6
A wide variety of Lighting
Lamps
12-2
A wide variety of Vacuum Components

13-8
Flowmeters by DIGMESA
(above:FHKU series)
We carry a variety of
Flowmeters by DIGMESA
13-9
We carry a variety of
Flowmeters by DIGMESA.
13-10

13-11
Lamp for Ozone Analyzer

Optical・Inspection[ Microscope・Measurement ]

Metallurgical Microscope
OLYMPUS
DSX500
1-DSX500
OLYMPUS
DSX100
1-DSX100
OLYMPUS
MX61
1-mx61
OLYMPUS
MX51
1-mx51
OLYMPUS
BX51
1-szx7
OLYMPUS
MX61+AL120
1-AL120-MX61
OLYMPUS
Stream
1-Stream
Mitutoyo
mini-Microscope unit VMU
1-VMU

Stereoscopic Microscope
OLYMPUS
SZX16
2-szx16
OLYMPUS
SZX10
2-szx10
OLYMPUS
SZX7
2-szx7

OLYMPUS
SZ61
2-sz61
OLYMPUS
SZ61+SZ2-STU2
arrangement
2-SZ61+SZ2-STU2
OLYMPUS
SZ61+SZ2-STU3
arrangement
2-SZ61+SZ2-STU3

Mitutoyo
Stereoscopic Microscope
MSM400
2-MSM400

Laser Microscope
OLYMPUS
LEXT OLS-4000
3-OLS-4000

Measuring Microscope
OLYMPUS
STM6-PLUS
4-STM6-PLUS
OLYMPUS
STM6-LM
4-STM6-LM
OLYMPUS
STM6
4-STM6
Mitutoyo
Hyper-MF
4-HyperMF
Mitutoyo
MF Series
4-MF
Mitutoyo
Measuring
Microscope+unit
4-ImageUnit

※You may contct with us for various calibration services.


Projector
Mitutoyo PH-3515F
5-PH-3515F
Mitutoyo PJ-H30
5-PJ-H30
Mitutoyo PJ-A3000
5-PJ-A3000

※You may contct with us for various calibration services.

Vision Measuring Machine
Mitutoyo
QS-LAF/B・QS-LZB
QS-EB Series
6-QS-LAF
Mitutoyo
2D-Manual
QI Series
6-2D-QI
Mitutoyo
mini-CNC
QS Series
6-CNC-QS

Mitutoyo
CNC QV Series
6-CNC-QV
Mitutoyo
CNC QV ELF Series
6-CNC-QV-ELF

Three D Measuring Instruments
Mitutoyo
LEGEX
7-LEGEX
Mitutoyo
STRATO-Apex
7-STRATO-Apex
Mitutoyo
FALCIO Apex
7-FALCIO

Mitutoyo
MACHSeries
7-MACH
Mitutoyo
Crysta-Apex
7-Crysta-Apex
Mitutoyo
Spine Arm
7-SA-A

Optical・Inspection[ Inspection・Analyzers ]

Mitutoyo Corporation: (Roughness Gauge, Contour Measuring instruments, Roundness testing machine, Hardness Testing Maching, Vibration Gauge, Seismometer )

Hardness Testing Machine
27-AVK-C0-1
Seismometer
27-DAS-410-1

Otsuka Electronics Co., Ltd : Multi Channel Photo Detector

27-MCPD-9800

TOSHIBA TELI CORPRATIOM :High Vision Camera
KYOWA INTERFACE SCIENCE CO., LTD: Contact Augle Meters
HIROX CO., Ltd: Digital Microscope

DAINIPPON SCREEN MFG. CO., LTD・・・Film Thickness Mesurement System

27-1

Optical・Inspection[ etc ]

  • Various optical components (Lens Filters)
  • Lighting equipments
  • Vacuum equipments and parts
  • Flowmeters by DIGMESA, Tokyo Keiso
  • Processing and various coating
  • Environmental testing machines
  • Testing Equipment
  • Clean Booth by Dalton
    27-2
  • Vibration-free Table by Tokkyokiki corp
    27-3
  • Cleaning system of Hydrocarbons
    GV10x Downstream Asher
    27-5

Possible-made Equipments

Resistivity&Thickness Measurement
15-6
Wafer Sorter
15-7

Wafer Particle Cleaner
15-2
Both Faces Microscoop
15-1

Wafer Edge Profiler
15-5
Wafer Id Reader
15-3


※We design and develop suitable equipments, according to application.
 Please feel free to contact with us.

Repair Services

Laser concerns
We are capable to accept Laser Repair and Refurbishment of various usages.
Please feel free to contact with us.
Turbo Molecular Pumps
We are capable to accept TMP Repair and Refurbishment of various kinds.
Please feel free to contact with us.
Various countermeasures against aging of Equipments
  • Replacement of CRT for exposure apparatus
  • Replacement of CRT Monitors to LCD Display
  • Replacement of Motors of discontinued models, etc.