Photolitho
We carry a variety of optical components ;
Interference Filter, Cover Glasses, Input-Lens, etc.
Implant
We carry a variety of parts forImplantation Process, made of Tungsten or Molybdenum.
Etching
We carry a variety parts for Etching Process;
Anodized Upper Electrodes, Lower Electrodes, Quarts or Ceramic parts.
Anodized or Polyimide ESC Refurbishment is also available.
Sputtering
We carry a variety of Clamp Rings by Titanium or SUS, Lift Hoops and Inner Sheilds.
Magnet Refurbishment is also available.
CVD
We carry a variety of Anodized Al parts, Ceramic parts and Quartz parts.
Refurbishment of Metal Heaters or Ceramic Heaters are also available.
CMP
We carry Pad Conditioners and Retainler Rings for CMP Process.
Wafer Cleaning (Spin Dryer)
We deal with cleaning equipment for various semiconductors.
etc
A wide variety of Heating
Lamps
A wide variety of Lighting
Lamps
A wide variety of Vacuum Components
Flowmeters by DIGMESA
(above:FHKU series)
We carry a variety of
Flowmeters by DIGMESA
We carry a variety of
Flowmeters by DIGMESA.
Lamp for Ozone Analyzer
Metallurgical Microscope
OLYMPUS
3D Laser Confocal Microscope
OLS-5000
OLYMPUS
DSX510
OLYMPUS
DSX110
OLYMPUS
MX63
OLYMPUS
BX53
OLYMPUS
Wafer Loader AL120
OLYMPUS
Stream
Mitutoyo
mini-Microscope unit VMU
Stereoscopic Microscope
OLYMPUS
SZX16
OLYMPUS
SZX10

OLYMPUS
SZX7

OLYMPUS
SZ61
OLYMPUS
SZ61+SZ2-STU2 arrangement
OLYMPUS
SZ61+SZ2-STU3 arrangement
Measuring Microscope
OLYMPUS
STM7-BSW
Mitutoyo
Measuring Microscope+unit

※You may contct with us for various calibration services.
Projector
Mitutoyo PH-3515F
Mitutoyo PJ-H30
Mitutoyo PJ-A3000
※You may contct with us for various calibration services.
Vision Measuring Systems
Mitutoyo
CNC Vision Measuring Systems
QV Series
Mitutoyo
Non-stop CNC Vision Measuring Systems
QV STREAM Series

Mitutoyo
Non-contact 2-D Vision Measuring Systems
QI Series
Mitutoyo
Manual Vision Measuring Systems
QS Series
Three D Measuring Instruments
Mitutoyo
LEGEX
Mitutoyo
CRYSTA-Apex
Mitutoyo
MACH
Mitutoyo Corporation: (Roughness Gauge, Contour Measuring instruments, Roundness testing machine, Hardness Testing Maching, Vibration Gauge, Seismometer )
Hardness Testing Machine AVK
Seismometer
Otsuka Electronics Co., Ltd : Multi Channel Photo Detector
TOSHIBA TELI CORPRATIOM :High Vision Camera
KYOWA INTERFACE SCIENCE CO., LTD: Contact Augle Meters
HIROX CO., Ltd: Digital Microscope
Resistivity&Thickness Measurement
Wafer Sorter
Wafer Particle Cleaner
Both Faces Microscoop
Wafer Edge Profiler
Wafer Id Reader
※We design and develop suitable equipments, according to application.
Please feel free to contact with us.
Laser concerns
We are capable to accept Laser Repair and Refurbishment of various usages.
Please feel free to contact with us.
Turbo Molecular Pumps
We are capable to accept TMP Repair and Refurbishment of various kinds.
Please feel free to contact with us.
Various countermeasures against aging of Equipments
- Replacement of CRT for exposure apparatus
- Replacement of CRT Monitors to LCD Display
- Replacement of Motors of discontinued models, etc.