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Semiconductor

Photolitho
11-5
We carry a variety of optical components ;
Interference Filter, Cover Glasses, Input-Lens, etc.

Implant
22-2-3
22-2-4
We carry a variety of parts forImplantation Process, made of Tungsten or Molybdenum.

Etching
24-6
24-5
24-4
We carry a variety parts for Etching Process;
Anodized Upper Electrodes, Lower Electrodes, Quarts or Ceramic parts.
Anodized or Polyimide ESC Refurbishment is also available.

Sputtering
20-6
20-7
We carry a variety of Clamp Rings by Titanium or SUS, Lift Hoops and Inner Sheilds.
Magnet Refurbishment is also available.

CVD
21-10
21-11
21-5

21-12
21-13
We carry a variety of Anodized Al parts, Ceramic parts and Quartz parts.
Refurbishment of Metal Heaters or Ceramic Heaters are also available.

CMP
28-1
28-2
We carry Pad Conditioners and Retainler Rings for CMP Process.

Wafer Cleaning (Spin Dryer)
11-5
We deal with cleaning equipment for various semiconductors.

etc
13-4
A wide variety of Heating
Lamps
13-6
A wide variety of Lighting
Lamps
12-2
A wide variety of Vacuum Components

13-8
Flowmeters by DIGMESA
(above：FHKU series)
We carry a variety of
Flowmeters by DIGMESA
13-9
We carry a variety of
Flowmeters by DIGMESA.
13-10

13-11
Lamp for Ozone Analyzer

Optical･Inspection[ Microscope･Measurement ]

Metallurgical Microscope
OLYMPUS
3D Laser Confocal Microscope
OLS-5000
OLYMPUS
DSX510

OLYMPUS
DSX110


OLYMPUS
MX63

OLYMPUS
BX53

OLYMPUS
Wafer Loader AL120

OLYMPUS
Stream
1-Stream

Mitutoyo
mini-Microscope unit VMU
1-VMU

Stereoscopic Microscope
OLYMPUS
SZX16
2-szx16
OLYMPUS
SZX10
2-szx10
OLYMPUS
SZX7
2-szx7

OLYMPUS
SZ61
2-sz61
OLYMPUS
SZ61+SZ2-STU2 arrangement
2-SZ61+SZ2-STU2
OLYMPUS
SZ61+SZ2-STU3 arrangement
2-SZ61+SZ2-STU3

Measuring Microscope
OLYMPUS
STM7-BSW
Mitutoyo
Measuring Microscope+unit
4-ImageUnit
※You may contct with us for various calibration services.

Projector
Mitutoyo　PH-3515F
5-PH-3515F
Mitutoyo　PJ-H30
5-PJ-H30
Mitutoyo　PJ-A3000
5-PJ-A3000
※You may contct with us for various calibration services.


Vision Measuring Systems
Mitutoyo
CNC Vision Measuring Systems
QV Series
Mitutoyo
Non-stop CNC Vision Measuring Systems
QV STREAM Series

Mitutoyo
Non-contact 2-D Vision Measuring Systems
QI Series
6-2D-QI
Mitutoyo
Manual Vision Measuring Systems
QS Series
6-CNC-QS


Three D Measuring Instruments
Mitutoyo
LEGEX
Mitutoyo
CRYSTA-Apex
Mitutoyo
MACH

Optical･Inspection[ Inspection･Analyzers ]

Mitutoyo Corporation: (Roughness Gauge, Contour Measuring instruments, Roundness testing machine, Hardness Testing Maching, Vibration Gauge, Seismometer )

Hardness Testing Machine AVK
27-AVK-C0-1
Seismometer
27-DAS-410-1
Otsuka Electronics Co., Ltd : Multi Channel Photo Detector

27-MCPD-9800

TOSHIBA TELI CORPRATIOM :High Vision Camera
KYOWA INTERFACE SCIENCE CO., LTD: Contact Augle Meters
HIROX CO., Ltd: Digital Microscope

Optical･Inspection[ etc ]

  • Various optical components (Lens Filters)
  • Lighting equipments
  • Vacuum equipments and parts
  • Flowmeters by DIGMESA
  • Processing and various coating
  • Environmental testing machines
  • Testing Equipment
  • Clean Booth
  • Vibration-free Table
  • Cleaning system of Hydrocarbons
    GV10ｘ Downstream Asher
    27-5

Possible-made Equipments

Resistivity&Thickness Measurement
15-6
Wafer Sorter
15-7

Wafer Particle Cleaner
15-2
Both Faces Microscoop
15-1

Wafer Edge Profiler
15-5
Wafer Id Reader
15-3


※We design and develop suitable equipments, according to application.
　Please feel free to contact with us.

Repair Services

Laser concerns
We are capable to accept Laser Repair and Refurbishment of various usages.
Please feel free to contact with us.
Turbo Molecular Pumps
We are capable to accept TMP Repair and Refurbishment of various kinds.
Please feel free to contact with us.
Various countermeasures against aging of Equipments
  • Replacement of CRT for exposure apparatus
  • Replacement of CRT Monitors to LCD Display
  • Replacement of Motors of discontinued models, etc.