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Semiconductor

Photolitho
11-5
We carry a variety of optical components ;
Interference Filter, Cover Glasses, Input-Lens, etc.

Implant
22-2-3
22-2-4
We carry a variety of parts forImplantation Process, made of Tungsten or Molybdenum.

Etching
24-6
24-5
24-4
We carry a variety parts for Etching Process;
Anodized Upper Electrodes, Lower Electrodes, Quarts or Ceramic parts.
Anodized or Polyimide ESC Refurbishment is also available.

Sputtering
20-6
20-7
We carry a variety of Clamp Rings by Titanium or SUS, Lift Hoops and Inner Sheilds.
Magnet Refurbishment is also available.

CVD
21-10
21-11
21-5

21-12
21-13
We carry a variety of Anodized Al parts, Ceramic parts and Quartz parts.
Refurbishment of Metal Heaters or Ceramic Heaters are also available.

CMP
28-1
28-2
We carry Pad Conditioners and Retainler Rings for CMP Process.

Wafer Cleaning (Spin Dryer)
11-5
We deal with cleaning equipment for various semiconductors.

etc
13-4
A wide variety of Heating
Lamps
13-6
A wide variety of Lighting
Lamps
12-2
A wide variety of Vacuum Components

13-8
Flowmeters by DIGMESA
(above:FHKU series)
We carry a variety of
Flowmeters by DIGMESA
13-9
We carry a variety of
Flowmeters by DIGMESA.
13-10

13-11
Lamp for Ozone Analyzer