Photolitho
We carry a variety of optical components ;
Interference Filter, Cover Glasses, Input-Lens, etc.
Implant
We carry a variety of parts forImplantation Process, made of Tungsten or Molybdenum.
Etching
We carry a variety parts for Etching Process;
Anodized Upper Electrodes, Lower Electrodes, Quarts or Ceramic parts.
Anodized or Polyimide ESC Refurbishment is also available.
Sputtering
We carry a variety of Clamp Rings by Titanium or SUS, Lift Hoops and Inner Sheilds.
Magnet Refurbishment is also available.
CVD
We carry a variety of Anodized Al parts, Ceramic parts and Quartz parts.
Refurbishment of Metal Heaters or Ceramic Heaters are also available.
CMP
We carry Pad Conditioners and Retainler Rings for CMP Process.
etc
A wide variety of Heating
Lamps
A wide variety of Lighting
Lamps
A wide variety of Vacuum Components
Flowmeters by DIGMESA
(above：FHKU series)
We carry a variety of
Flowmeters by DIGMESA
We carry a variety of
Flowmeters by DIGMESA.
Lamp for Ozone Analyzer
